-
SEM (Hitachi S4800), metamaterial characterization and general nanostructure characterization; AFM (Veeco CP2), metamaterial characterization and general nanostructure characterization; opt microscope Hyperion; Standard optical microscopy;
Fabrication
- HFETs and devices for low dimensional transport (2DEG GaAs/AlGaAs) , VCSEL (650 nm – 670 nm), high power DFB lasers (GaInP/AlGaInP, 1W @670 nm), Dynamic single mode lasers (20 GHz, 1550 nm)
- High resolution e-beam lithography Jeol 5DII U (down to 10 nm, depending on resist system used); optical holography for metamaterial production; Standard optical lithography;
Dry etching (RIBE (technics Plasma), ECR-RIE (Leybold and Oxford PlasmaLab90)), RTA (rapid thermal annealing), Deposition techniques (PECVD, thermal evaporation deposition (Varian), e-gun-deposition (Leybold PLS500), sputter deposition (Varian)
Table: Expertise by material type and sample geometry combinations:
Materials types
Slabs
Complex shape object
Bulk samples or bars
Substrate
layer(s) on substrate
Sub-wave
length
samples
Thin films
Isotropic materials
Optical,
R,T,A,S,E
GHz,R,T
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
GHz,R,T
Optical,
R,T,A,S,E
GHz,R,T
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
GHz,R,T
Photonic crystals
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Quasicrystals
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Mesoscopic samples
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Bianisotropic
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Anisotropic
inversion symmetrical
Active materials
Controllable materials
Optical,
R,T,A,S,E
Diffraction gratings
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Scattering media
Stacked resonator structures with frequency selective mirrors
isotropic
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Optical,
R,T,A,S,E
Notation used here:
Frequency range: MHz, GHz, THz or optical R - reflection coefficient amplitude or intensity; T - transmission coefficient or intensity, P - phase information; A - reflection and transmission on many angles of incidence; E - ellipsometry data; D - ray velocity direction or distortion (do not mix, please, with isotropic refraction index characterization); S - internal structure investigation with microscopy (nanoscopy); Ch - chemical properties investigation (metal or dielectric etc.); Chi(2)/Chi(3) of the material